Position detection apparatus

ABSTRACT

An apparatus includes a means for providing a predetermined frequency difference between two light beams and generating an optical beat with respect to interference between first and second diffracted light beams from a diffraction grating formed on a substrate, and a means for detecting a phase difference between the optical beat and a reference signal having a frequency corresponding to the frequency difference between the two light beams, and detects a position of the substrate based upon the phase difference in accordance with an optical heterodyne interference method.

.Iadd.This is a continuation of application Ser. No. 444,783 filed Dec.1, 1989, now abandoned which is a reissue of U.S. Pat. No. 4,710,026..Iaddend.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a position detection apparatus for asemiconductor wafer, a photomask, and the like using a diffractiongrating and, more particularly, to a position detection apparatussuitable for alignment in accordance with a holographic alignmentmethod.

2. Related Background Art

Recent semiconductor devices have been highly micropatterned andintegrated, and alignment of a photomask (reticle) with a wafernecessary for manufacturing a semiconductor device requires a higherprecision. In order to accomplish this, a holographic alignment methoddisclosed in, e.g., Japanese Patent Disclosure No. 192917/1983 has beenproposed. In this method, two coherent light beams having the samefrequency are incident from two directions. A wafer, which has adiffraction grating aligned parallel to interference fringes obtained byinterference between the two light beams, is arranged along a commonoptical path of the two light beams. Then, light beams reflected,transmitted, or diffracted by the diffraction grating are againinterfared with each other, and a position of the interference fringesrelative to the position of the diffraction grating is detected based ona signal obtained by photoelectrically converting the interferenceintensity. In other words, this method detects a change in interferenceintensity due to changes in phases of first diffracted light generatedin a specific direction upon radiation of one of the two light beamsonto the diffraction grating and second diffracted light generated inanother specific direction upon radiation of the other light beam ontothe diffraction grating according to movement of the diffraction gratingrelative to the two light beams. This method can improve a detectionprecision, but creates a serious problem in practical applications. Morespecifically, changes in intensities of first and second diffractedlight beams due to a change in intensity of a light source forgenerating two coherent light beams, a change in intensity ratio betweentwo light beams, and mismatching of a diffraction grating directly causeposition detection errors. Although the change in intensity of the lightsource and the change in intensity ratio between two light beams can beconsiderably eliminated during apparatus design and the manufacturethereof, time variations cannot be eliminated. Since the changes inintensities of the first and second diffracted light beams occurdepending on a shape of the diffraction grating and its surfacecondition, it is difficult to compensate for them at the apparatus side.

Furthermore, a photo-electrical signal, whose level varies in accordancewith deviations, cannot be obtained unless the interference fringesformed by the two light beams are moved relative to the diffractiongrating on the wafer. This means that precise alignment is disableduntil the interference fringes and the diffraction grating arerelatively moved by one period. This also means that alignment timecannot be shortened in the apparatus.

SUMMARY OF THE INVENTION

It is a principal object of the present invention to provide anapparatus which is free from the conventional drawbacks, and can performposition detection with high precision irrespective of a change in lightintensity.

It is another object of the present invention to provide a positiondetection apparatus which can detect an amount of deviation within oneperiod without moving two light beams relative to a diffraction grating.

An apparatus of the present invention includes a means for providing apredetermined frequency difference between two light beams andgenerating an optical beat with respect to interference between firstand second diffracted light beams from a diffraction grating formed on asubstrate, and a means for detecting a phase difference between theoptical beat and a reference signal having a frequency corresponding tothe frequency difference between the two light beams, and detects aposition of the substrate based on the phase difference in accordancewith an optical heterodyne interference method.

When the present invention is applied to an apparatus for measuringmatching precision of a pattern formed on a semiconductor substrate in asemiconductor manufacturing apparatus, an apparatus with considerablyhigh precision can be realized.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic block diagram of a position detection apparatusaccording to a first embodiment of the present invention;

FIG. 2 is a timing chart of a reference signal MS and a photo-electricalsignal I;

FIG. 3 is a graph showing output characteristics of a phase-differencesignal;

FIG. 4 is a schematic block diagram of a position detection apparatusaccording to a second embodiment of the present invention;

FIG. 5 is a perspective view of a main part of two-light beam emittingmeans according to a third embodiment of the present invention;

FIG. 6 is a schematic block diagram of a position detection apparatusaccording to the third embodiment of the present invention;

FIG. 7 is a plan view of a diffraction grating on a wafer;

FIG. 8 is a plan view of a photo-electric conversion element array; and

FIG. 9 is a block diagram of a deviation detection control circuit ofFIG. 6.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIG. 1 shows schematic arrangement of a position detection apparatusaccording to a first embodiment of the present invention. Laser beams LBfrom a laser beam source 1 are incident on an acoustooptic modulator 2to form two light beams 10 and 12. The collimated 0th-order light beam10 of the laser beams LB is reflected by a mirror 3, and is obliquelyradiated onto a substrate (e.g., a wafer) 4. The light beam (+1st-orderlight beam) 12 frequency-modulated by the modulator 2 is deflected by apredetermined angle with respect to the 0th-order light beam 10, and isobliquely radiated onto the substrate 4 as a collimated light beam. Themodulator 2 receives a reference signal (modulation signal) MS having afrequency f from an oscillator 6 so as to shift a frequency of themodulated light beam 12 by f from that of the 0th-order light beam 10.

The substrate 4 comprises a diffraction grating 41, in which elongatedgrating elements extending in a direction perpendicular to the drawingare arranged in a left-and-right direction of the drawing to be parallelto each other at a given pitch. The two light beams 10 and 12 areincident so that interference fringes obtained by interference betweenthe 0th-order light beam 10 and the modulated light beam 12 are parallelto the grating elements in the diffraction grating 41. At this time,since frequencies of the 0th-order light beam 10 and the modulated lightbeam 12 are different from each other, the interference fringes due tothe two light beams are not fixed in position but move at the frequencyf with respect to the substrate 4, thus generating an optical beat. Apitch of the interference fringes has an integral multiple of that ofthe diffraction grating 41.

The substrate 4 is placed on a stage 5 for alignment, which is movablein the left-and-right direction of the drawing by a driving motor 21.Positions of the stage 5 with respect to the apparatus main body aresubsequently detected by a laser interferometer 20.

When the 0th-order light beam 10 is radiated onto the diffractiongrating 41, diffracted light beams of various orders of diffraction aregenerated at corresponding angles. A diffracted light beam 11 of acertain order generated at a diffraction angle β is received by aphoto-electric detector (e.g., photomultiplier) 7 through a slit plate71 having slit parallel to the grating 41. At the same time, since themodulated light 12 becomes incident on the diffraction grating 41, thisalso produces diffracted light beams of various orders of diffraction atcorresponding diffraction angles. The photo-electric detector 7 receivesthrough the slit plate 71 a diffracted light beam 13 of a certain order,which is generated at a diffraction angle α and propagates alongsubstantially the same optical path as the light beam 11. Fringes areformed on the light-receiving surface of the photo-electric detector 7due to the interference between the diffracted light beams 11 and 13,and the fringes are changed at a frequency of the optical beat, that is,at the frequency f of the reference signal MS. Thus, thephoto-electrical signal I from the photo-electric detector 7 has asinusoidal waveform of the frequency f. The photo-electrical signal isamplified by an amplifier 9, and then supplied to a phase-differencedetector 8. The detector 8 also receives the reference signal MS fromthe oscillator 6 to detect a phase error of the photo-electrical signalwith respect to the reference signal MS, and produces a phase-differencesignal PDS corresponding to an amount of deviation.

A main control device 22 receives the phase-difference signal PDS andposition data from an interferometer 20, and servo-controls the motor 21so that the phase-difference signal PDS becomes zero (e.g., the phaseerror is zero). Thereby, one-dimensional alignment of the substrate 4 ismade. Note that the phase-difference detector 8 can use an FM detectioncircuit or phasemeter. A frequency regulator 30 for varying theoscillation frequency f is connected to the oscillator 6 to adjust theangle α by varying a deflection angle of the modulated light beam 12with respect to the 0th-order light beam 10 emitted from the modulator2. In general, after a pitch of the diffraction grating, a wavelength ofcoherent light, and an incident angle of the coherent light aredetermined, directions of the diffracted light beams of respectiveorders are uniquely determined. For this reason, the diffracted lightbeam 13 of a certain order of diffraction cannot always be generatedalong the optical path parallel to another diffracted light beam 11, andcannot always accurately pass through the slit plate 71. In order toovercome this, optical adjustment is performed so that the incidentangle of the modulated light beam 12 is fine-adjusted and the diffractedlight beam 13 of the certain order is just parallel to the diffractedlight beam 11.

If the frequency f of the oscillator 6 is set to be variable, lateradjustment can be freely performed. The laser beam source 1, themodulator 2, the mirror 3, and the slit plate 71 need not be accuratelyarranged during the manufacture thereof. Furthermore, since therespective optical members need not be moved mechanically, timevariations are hard to occur.

The frequency f can be finely adjusted such that an amplitude (e.g.,peak-to-peak) of the photo-electrical signal from the photo-electricdetector 7 is detected and adjusted to be maximum. In this case, theregulator 30 can comprise a circuit for detecting the amplitude of thephoto-electrical signal, a circuit for storing the maximum value of thedetected amplitude, a circuit for sweeping an oscillation frequencywithin a predetermined range, and the like. For example, the maximumvalue of the amplitude is stored in the first frequency sweep operation,and the stored maximum value and the detected amplitude are comparedwith each other in the second frequency sweep operation. Then, when theycoincide with each other, the sweep operations are stopped for fixingthe frequency. In this way, the apparatus can be automatically set(self-set) under ideal conditions.

Note that FIG. 1 illustrates as if the modulated light beam 12 and the0th-order light beam 10 are separated at a relatively large deflectionangle. However, since such a large deflection angle cannot be obtainedin practice, the optical path of the modulated light beam 12 is changedby a mirror to prepare an incident condition, as shown in FIG. 1. Sincethe 0th-order light beam 10 and the modulated light beam 12 have thefrequency difference f, their wavelengths are also different from eachother. However, a wavelength difference between absolute values of thewavelengths of the two light beams is very small (about 10⁻⁶ to 10⁻¹²),and they can be regarded to have same wavelength.

The operation of this embodiment will now be described. FIG. 2 is atiming chart of the reference signal MS and the photo-electrical signalI from the photo-electric detector 7. In FIG. 2, the abscissa representstime t and the ordinate represents levels of the respective signals. Aspreviously described, since the 0th-order light beam 10 and themodulated light beam 12 have the frequency difference f, thephotoelectrical signal I becomes a so-called optical beat signal, andhas a sinusoidal waveform at the frequency f similar to that of thereference signal MS. Assuming that the substrate 4 is fixed in positionwith respect to the two light beams 10 and 12, a phase difference θbetween the reference signal MS and the photo-electrical signal I isconstant. The phase difference θ can be easily obtained by thephase-difference detector 8 from the level of the phase-differencesignal PDS. When the substrate 4 is moved by the stage 5, the phasedifference θ continuously changes in proportion to the moving amount. Ofcourse, a range to be detected as the phase difference θ is within 2π,and if a direction of phase shift is taken into consideration, within+π. FIG. 3 is a graph showing output characteristics of thephase-difference signal PDS, in which the abscissa represents an outputlevel of the signal PDS, and the ordinate represents a position x of thesubstrate 4 relative to the two light beams 10 and 12. When thesubstrate 4 is aligned with respect to the two light beams 10 and 12,coarse alignment is first performed by means of the stage 5, so that analignment error falls within a range LP (corresponding to +π of thephase difference) by a known pre-alignment or global-alignment means. Ifthe two light beams 10 and 12 have a wavelength λ, the range LP isexpressed by:

    LP=λ/(sin α+sin β)

For example, if the wavelength λ is 600 nm (0.6 μm), and the angles αand β are 30°, the range LP is 0.6 μm from the above equation. If aprecise position of the alignment corresponds to a zero point of thephase-difference signal PDS, the coarse alignment requires precision of±0.3 μm. Even if the wavelength is left unchanged, the range LP iswidened and the precision of the coarse alignment is not so severe asthe angles α and β decrease. After completion of the coarse alignment,the main control device 22 fetches the phase-difference signal PDS, anddetects a deviation direction based on the polarity thereof and anamount of deviation based on the magnitude thereof. Then, the device 22causes the motor 21 to move the stage 5 finely to adjust thephase-difference signal PDS to be 0. Alternatively, since thephase-difference signal PDS changes linearly, the signal PDS can befetched directly as an error signal in a feedback loop of a motorcontrol circuit. In this case, referring to the previous example, acontrol system is automatically switched, such that the motor 21 iscontrolled based on the interferometer 20 until the precision of ±0.3 μmis obtained, and then based on the phase-difference signal PDS withinthe range of ±0.3 μm. In this way, the stage 5 is automatically moveduntil the phase-difference signal PDS is phase-locked at the zero point.This can effectively satisfy both high-precision and high-speedrequirements.

In the above embodiment, one-dimensional alignment is performed. Whentwo-dimensional alignment is to be performed, another diffractiongrating extending along a direction perpendicular to the diffractiongrating 41 is arranged on the substrate 4, and need only be irradiatedwith light beams of difference frequencies from two directions. The slitof the slit plate 71 is arranged parallel to the grating elements of thediffraction grating 41, but can be an opening (e.g., a pinhole).Furthermore, an optical system for enlarging and projecting a partialimage of the diffraction grating 41 on the slit plate 71 can be providedbetween the slit plate 71 and the substrate 4.

A second embodiment of the present invention will be described withreference to FIG. 4. In this embodiment, the same reference numeralsdenote the same parts as in FIG. 1. In this embodiment, a Zeeman Laserbeam source 140 utilizing the Zeeman effect is used as a coherent lightsource. Zeeman laser beams LB' from the laser beam source 140 contain P-and S-polarized light components, which have a slight frequencydifference therebetween.

The Zeeman laser beams LB' are split into two light beams by a halfmirror 141, and one of these two beams is further split to P- andS-polarized beams 110 and 112 by a polarization beam splitter 142. TheP-polarized beam 110 is reflected by mirrors 143 and 144, and isobliquely incident on a diffraction grating 41 of a substrate 4. TheS-polarized beam 112 is reflected by a mirror 145 to be obliquelyincident on the diffraction grating 41. Incident conditions of the P-and S-polarized beams 110 and 112 are the same as those in FIG. 1.Therefore, it is observed using analyzer that interference fringes aremoved on the diffraction grating 41 at a frequency of an optical beatdue to interference of the beams 110 and 112. In this embodiment,although not shown, an analyzer must be provided along each path of thebeams 110 and 112 or between the diffraction grating 41 and aphoto-electric detector 7, since polarization is utilized.

Meanwhile, the Zeeman laser beams LB' reflected by the half mirror 141are transmitted through an analyzer 146 and are incident on aphotomultiplier 147. An intensity thereof thus changes depending on afrequency corresponding to the difference between the frequencies of theP- and S-polarized beams. When a photo-electrical signal from thephotomultiplier 147 is amplified by an amplifier 148, the same referencesignal MS as in FIG. 1 is obtained. When a phase difference between thereference signal MS and the photo-electrical signal I is then detectedby a phase-difference detector 8, a relative position of the substrate 4can be detected. In this embodiment, a two-beam generating means isconstituted by the Zeeman laser beam source 140, the polarization beamsplitter 142, and the mirrors 143, 144, and 145, and a reference signalgenerating means is constituted by the half mirror 141, the analyzer146, the photomultiplier 147, and the amplifier 148.

A third embodiment of the present invention will now be described withreference to FIG. 5. This embodiment shows a modification of thetwo-beam generating means, in which two coherent light beams A and B areobtained upon incidence of laser beams LB on a mechanically rotatingradial grating plate 50. The beam A corresponds to the 0th-order beam10, and the beam B corresponds to the modulated beam 12 in FIG. 1. Afrequency difference between the two light beams A and B is proportionalto a rotational speed of the radial grating plate 50 and, morespecifically, a moving speed of the radial grating with respect to thelaser beams LB. Therefore, a reference signal can be easily obtainedfrom a speed sensor for detecting rotation of the radial grating plate50. When the two light beams are to be obtained mechanically, since thefrequency difference therebetween is at most several tens of kHz, asemiconductor light-receiving element of slower response than thephotomultiplier can be used as a photo-electric sensor.

For another modification, two semiconductor lasers of the same type canbe used as respective beam emitting means. In general, even if thesemiconductor lasers of the same type are used, they have individualvariations in characteristics, and laser beams emitted therefrom have aslight frequency difference therebetween. Therefore, these variationsare positively used to obtain two beams. In this case, since thefrequency difference is considered not to be constant, a polarizer isadded for polarizing the light beams from the respective semiconductorlasers to vertical- and lateral-polarized beams. Thus, the separatelypolarized beams are mixed into a single light beam, and the mixed lightbeam is radiated on an analyzer shown in FIG. 3 to obtain the referencesignal.

With this arrangement, a very compact position detection apparatus canbe obtained. However, individual semiconductor lasers must have stableoscillation frequencies and must be free from mode jump, and so on.

An embodiment to which the present invention is applied to measurementof matching precision when a plurality of photosensitive layers arematched on a substrate, will now be described.

Referring to FIG. 6, a wafer 202 of interest is placed on a stage 201.The wafer 202 has already been subjected to the double printing anddevelopment process by an exposure apparatus, so that an exposurepattern formed on a photomask or reticle of the exposure apparatus isprinted on the surface thereof.

When two exposure patterns are printed on the wafer 202, a gratingpattern 240 representing printing positions of these patterns and havingtwo pairs of diffraction gratings shown in FIG. 7 is formed thereon. Afirst pair of diffraction gratings 241 and 243 is printed on the waferwith the exposure pattern during a first exposure process, and consistsof grating elements, which have a pitch d in the y direction and extendin the x direction. These gratings 241 and 242 are formed to beseparated at a predetermined interval in the x direction.

In contrast to this, a second pair of diffraction gratings 242 and 244are formed during a second exposure process, and consists of gratingelements, which have a pitch d in the y direction and extend in the xdirection. A pair of the grating elements is printed to be offset fromthe first pairs of the diffraction gratings in the y direction.

If the first and second pairs of the diffraction gratings are not offsetin the y direction, the respective grating elements of the first andsecond pairs of the diffraction gratings 241, 243, 242, and 244 can bealigned in the x direction. In this case, it can be determined thatthere is no deviation between first and second exposure patterns.However, if the first and second exposure patterns are offset in the ydirection by Δy, this offset appears as a deviation Δy between thecorresponding grating elements.

In order to form the first and second pairs of diffraction gratings 241,243, 242 and 244 alternately, matching exposure can be performed usingfirst and second photomasks or reticles on which diffraction gratingpatterns are formed to be offset in the x direction in advance.Alternatively, in order to accomplish this, diffraction grating patternsare formed at the same positions on first and second photomasks orreticles. When exposure is performed using one photomask, the photomask(or reticle) and the wafer can be offset in the x direction by a givendistance during the printing process.

In doing so, two coherent light beams 210 and 212 having a frequencydifference Δf are radiated onto the first and second pairs of thediffraction gratings 241, 243, 242, and 244 from different directions,thereby producing interference fringes which scan the diffractiongrating pattern 240 at the frequency Δf in the direction of pitch of thegrating elements. In this case, a pitch of interference fringes isdetermined to be 1/2 times the alignment pitch d of the grating elementsconstituting the diffraction grating.

In this embodiment, the coherent light beams 210 and 212 are formedbased on a common laser 211. Laser beams generated from the laser 211are split by a beam splitter 213 through a collimator lens system. Afirst laser beam is incident on an acoustooptic modulator 215, so thatits frequency is shifted by a frequency f₁ of a modulation signal S1,and is then radiated as a first coherent beam 210 onto the diffractiongrating pattern 240 on the wafer 202 by means of mirrors 217 and 219.

A second laser beam is incident on an acoustooptic modulator 225 througha mirror 223, so that its frequency is shifted by a frequency f₂ of amodulation signal S2, and is then radiated as a second coherent beam 212onto the wafer 202 by means of mirrors 227 and 229.

+1st-order and -1st-order diffracted beams of the beams 210 and 212 bythe grating pattern 240 on the wafer pass through an objective lens 231while being interfered with each other, and are then radiated onto aphoto-electric conversion element array 237 through an aperture 233 anda half mirror 235.

The photo-electric conversion element array 237 has photo-electricconversion elements 251, 252, 253, and 254 corresponding to thediffraction gratings 241, 242, 243, and 244, as shown in FIG. 8, whichare aligned at positions corresponding to diffracted beam portionsgenerated by the respective diffraction gratings.

The outputs from the elements 251, 252, 253, and 254 are supplied to adeviation detection control circuit 260 shown in FIG. 9. The circuit 260supplies the outputs from these elements 251, 252, 253, and 254 to a PLL(phase locked loop) circuits 281, 282, 283, and 284 throughpreamplifiers 271, 272, 273, and 274, respectively. Thus, phase signalslocked at phases of the outputs of the elements 251, 252, 253, and 254can be obtained from the output terminals of the respective PLLcircuits.

The diffracted beams radiated onto the elements 251, 252, 253, and 254have phases corresponding to the positions of the diffraction gratings241, 242, 243, and 244, respectively. Therefore, the phases of therespective phase signals indicate the y-direction positions of thecorresponding diffraction gratings. For this reason, when a phasedifference between the phases of the phase signals respectivelycorresponding to the first and second pairs of diffraction gratings 241,243, 242, and 244 is detected, a deviation therebetween can be detected.

To accomplish this, the deviation detection control circuit 260comprises: an oscillator 261 for supplying a reference signal S0 havinga reference frequency f₀ ; phase comparators 291, 292, 293, and 294 forproducing phase-difference outputs representing phase differencesbetween the phases of the reference signal S0 and the respective phasesignals; and operation unit 262 for calculating the positions of thediffraction gratings on the wafer based on the phase-difference outputsto operate a deviation between the first and second pairs of thediffraction gratings. The operation result is displayed on a displaydevice 263.

The circuit 260 further comprises an oscillator 264 for generating afrequency output S1 having a frequency f₁, which is supplied to themodulator 215 (FIG. 6) as the modulation signal.

The frequency output S1 is supplied together with the reference signalS0 to the frequency converter 265, which then supplies a frequencyoutput S2 having a sum frequency of the frequencies f₁ and f₀ to themodulator 215 as the modulation signal.

The half mirror 235 reflects the diffracted beams passing through theaperture 233 toward an eyepiece 239, so that the interference fringescan be visually observed. Thereby, incident directions of the coherentbeams can be controlled so that the interference fringes coincide withextending directions of the grating elements as possible.

In the above embodiments, the first and second coherent beams areradiated onto the diffraction grating on the substrate from thedifferent directions. However, if they have incident angles at whichinterference fringes can be generated on the diffraction grating, thetwo beams can be radiated along the same optical axis from the samedirection. However, in this case, diffracted beams of the first andsecond beams must have different orders of diffraction.

What is claimed is:
 1. An apparatus for detecting a position of anarticle on which a diffraction grating is provided,comprising:.Iadd.means for radiating a coherent light beam; .Iaddend..[.means for emitting.]. .Iadd.optical modulation means for receivingthe coherent light beam to emit .Iaddend.first and second coherent lightbeams radiated onto said diffraction grating, said first and secondlight beams having different frequencies .Iadd.and generatinginterference fringes that move along said diffraction grating due to thedifferent frequencies.Iaddend., thereby generating an optical beat basedon interference between diffracted light beams of said first and secondlight beams which are generated from said diffraction grating; means forproducing a reference signal having a frequency corresponding to afrequency difference between said first and second light beams; andmeans, including means for detecting said optical beat, for comparing aphase of said optical beat with that of said reference signal.
 2. Anapparatus according to claim 1, wherein said optical beat detectionmeans includes aperture means for extracting the diffracted light beamsof said first and second light beams which are generated in the samedirection from said diffraction grating.
 3. An apparatus according toclaim 2, wherein said optical beat detection means includesphotoelectric conversion means for receiving the diffracted light beamsextracted by said aperture means.
 4. An apparatus according to claim 1,wherein said emitting means includes means for determining incidentdirections of said first and second light beams, so that a direction ofa specific diffracted light beam of said first light beam coincides withthat of a specific diffracted light beam of said second light beam. 5.An apparatus according to claim 1, wherein said apparatus furtherincludes means for determining a position of said article in response tosaid comparison means. .[.6. An apparatus according to claim 1, whereinsaid emitting means includes means for radiating coherent light beams,and optical modulation means for receiving the coherent light beams soas to radiate two light beams having a frequency differencecorresponding to the frequency of said reference signal accordingthereto..].
 7. An apparatus according to claim .[.6.]. .Iadd.1.Iaddend.,wherein said optical modulation means includes an acoustoopticmodulator. .[.8. An apparatus according to claim 1, wherein saidemitting means includes a Zeeman laser source for radiating coherentlight beams including two different light components having differentpolarization directions and frequencies, and means for polarizing andsplitting the coherent light beams from said Zeeman laser source..]..[.9. An apparatus according to claim 8, wherein said reference signalproducing means includes an analyzer arranged to partially pass thecoherent light beams from said Zeeman laser source therethrough..]. 10.An apparatus according to claim 1, wherein said first and second lightbeams radiate said diffraction grating from different directions.
 11. Anapparatus for detecting a position of an article on which a diffractiongrating is provided, comprising:an apparatus main body; means fortwo-dimensionally moving said diffraction grating with respect to saidapparatus main body within a plane including said diffraction grating;means for measuring a position of said article with respect to saidapparatus main body during the two-dimensional movement; and means fordetecting the position of said article based on a pitch of saiddiffraction grating, said detection means including: means for.[.emitting.]. .Iadd.radiating a coherent light beam, optical modulationmeans for receiving the coherent light beam to emit .Iaddend.first andsecond coherent light beams .[.radiated.]. onto said diffractiongrating, said first and second light beams having different frequencies.Iadd.and generating interference fringes that move along saiddiffraction grating due to the different frequencies.Iaddend., therebygenerating an optical beat based on interference between diffractedlight beams of said first and second light beams which are generatedfrom said diffraction grating; means for producing a reference signalhaving a frequency corresponding to a frequency difference between saidfirst and second light beams; and means, including means for detectingsaid optical beat, for comparing a phase of said optical beat with thatof said reference signal.
 12. An apparatus for detecting a deviation inone direction between first and second diffraction gratings which have aperiodicity in said one direction and are arranged on an identical planeto be parallel to each other, comprising:means for emitting first andsecond coherent light beams radiated onto said first and seconddiffraction gratings, said first and second light beams having differentfrequencies, thereby generating interference fringes, which scan saidfirst and second diffraction gratings at a frequency corresponding to afrequency difference between said first and second light beams; meansfor producing a first alternative output having a frequencycorresponding to the frequency difference based on a diffracted lightbeam generated from said first diffraction grating by said interferencefringes; means for producing a second alternative output having afrequency corresponding to the frequency difference based on adiffracted light beam generated from said second diffraction grating bysaid interference fringes; and means for comparing phases of said firstand second alternative outputs. An apparatus according to claim 12,wherein said first and second light beams radiate said first and seconddiffraction gratings from different directions.
 14. An apparatusaccording to claim 12, wherein said apparatus further includes means forindependently extracting the diffracted light beams generatedrespectively from said first and second diffraction gratings.
 15. Anapparatus according to claim 14, wherein said extracting means includesfirst and second photo-electric conversion means, and optical means forfocusing the diffracted light beams generated from said first and seconddiffraction gratings onto said first and second photo-electricconversion means.
 16. An apparatus according to claim 12, wherein saidfirst and second diffraction gratings each includes grating elementsarranged at a pitch d, and frequencies of said first and second lightbeams are set so that a pitch of said interference fringes is d/2. . Anapparatus according to claim 12, wherein said comparison meansdetermines a deviation between said first and second diffractiongratings based on a phase difference between said first and secondalternative outputs. .Iadd.18. An apparatus for detecting a position ofan article, comprising:means for radiating a coherent light beam; meansfor forming from said coherent light beam first and second light beamshaving different frequencies and for emitting said first and secondlight beams to an area lying on said article to form thereoninterference fringes which move in a determined direction due to thedifferent frequencies; diffraction grating means provided on said areaof said article and having a pitch in a direction parallel with thepredetermined direction; means for detecting optical information fromsaid diffraction grating means irradiated by said first and second lightbeams to produce a detection signal; means for producing a referencesignal having a frequency corresponding to a frequency differencebetween said first and second light beams; and means for comparing aphase of said detection signal with that of said reference signal..Iaddend. .Iadd.19. An apparatus according to claim 18, wherein saidfirst and second light beams irradiate said diffraction grating meansfrom different directions. .Iaddend. .Iadd.20. An apparatus according toclaim 18, wherein said apparatus further includes means for determininga position of said article in response to said comparing means..Iaddend. .Iadd.21. An apparatus according to claim 18 furthercomprising means for visually observing said diffraction grating meansirradiated by said interference fringes. .Iaddend. .Iadd.22. Anapparatus according to claim 21, wherein said observing means includesmeans for extracting diffracted light beams which are generated in apredetermined direction from said diffraction grating means. .Iaddend..Iadd.23. An apparatus for detecting a position of an article on which adiffraction grating is provided, comprising:means for radiating acoherent light beam; first optical modulation means for receiving afirst part of the coherent light beam to shift the frequency by afrequency f1 and emitting a first modulated beam onto said diffractiongrating from a first direction; second optical modulation means forreceiving a second part of the coherent light beam to shift thefrequency by a frequency f2 and emitting a second modulated beam ontosaid diffraction grating from a second direction different from saidfirst direction; said first and second modulated beams forminginterference fringes that move along said diffraction grating due to thedifference between frequencies f1 and f2; means for detecting opticalinformation from said diffraction grating as a result of saidinterference fringes to produce a detection signal; means for producinga reference signal having a frequency corresponding to a frequencydifference between said first and second modulated beams; and means forcomparing a phase of said detection signal with that of said referencesignal. .Iaddend. .Iadd.24. An apparatus according to claim 23, whereineach of said first and second optical modulation means includes anacoustooptic modulator. .Iaddend. .Iadd.25. An apparatus according toclaim 24, wherein said apparatus further includes means for determininga position of said article in response to said comparing means..Iaddend. .Iadd.26. An apparatus according to claim 23, wherein saiddetecting means includes means for extracting diffracted light beamsgenerated in a predetermined direction from said diffraction grating..Iaddend. .Iadd.27. An apparatus according to claim 26, wherein saiddetecting means further includes photoelectric conversion means forreceiving the diffracted light beams extracted by said extracting means..Iaddend. .Iadd.28. An apparatus according to claim 23 furthercomprising means for visually observing said diffraction grating andinterference fringes formed thereon by said modulated beams. .Iaddend..Iadd.29. An apparatus according to claim 28, wherein said observingmeans includes means for extracting diffracted light beams generated ina predetermined direction from said diffraction grating. .Iaddend..Iadd.30. An apparatus according to claim 23 further comprising meansfor supplying a first frequency output having the frequency f1 to saidfirst optical modulation means and supplying a second frequency outputhaving the frequency f2 to said second optical modulation means..Iaddend. .Iadd.31. An apparatus according to claim 30, wherein saidsupplying means includes a first oscillator means for generating saidfirst frequency output, a second oscillator means for generating afrequency corresponding to said difference between said first and secondmodulated beams and frequency converter means for producing said secondfrequency output in response to said first and second oscillator means..Iaddend. .Iadd.32. An apparatus according to claim 7, wherein saidoptical modulation means includes means for applying a variablemodulation frequency to said acoustooptic modulator. .Iaddend.